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半導體設備零件 Shower Head
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半導體設備消耗性零件 Shower Head (Shower Plate, Face Plate, GDP,Blocker ...)
Plate, Perf.
Face Plate
Blocker Plate
GDP (Gas Distribution Plate)
Electrode
可提供P/N：
| Item | OEM P/N | Part Mame | Equipment |
| 1 | 0020-10117 | Plate,Perf, OX 200mm TEOS | AMAT |
| 2 | 0020-10122 | Plate Perf 125mm Oxide | AMAT |
| 3 | 0020-10123 | Plate, Perf Narrow, Nitride 200mm | AMAT |
| 4 | 0020-10771 | Plate, Perf, 150mm OX | AMAT |
| 5 | 0020-30086 | Plate, Perf, GIANT GAP Nitride | AMAT |
| 6 | 0020-31488 | Gas Distribution Plate, 13 Hole | AMAT |
| 7 | 0020-31492 | Gas Distribution Plate, 101 Hole | AMAT |
| 8 | 0020-34445 | Plate, Blocker, DxZ | AMAT |
| 9 | 0020-42284 | Plate 6" Blocker, EC WxZ | AMAT |
| 10 | 0020-42286 | Plate Perf 6", EC WxZ | AMAT |
| 11 | 0020-44453 | Blocker TEOS, 300SE, 300mm Producer | AMAT |
| 12 | 0020-48972 | Face Plate, LowK, XTRA Row Extending, 300mm Producer SE | AMAT |
| 13 | 0020-51923 | FacePlate, Silane NIT, 300mm Producer | AMAT |
| 14 | 0020-62625 | FacePlate, BLOK, Low K, PPC MFG+LSA CP, 300mm Producer SE | AMAT |
| 15 | 0021-00041 | Face Plate, SiN XG, DxZ DCVD | AMAT |
| 16 | 0021-00042 | Face Plate, TEOS DxZ DCVD | AMAT |
| 17 | 0021-01569 | Blocker Plate, He/N2 GIGA-Fill SACVD | AMAT |
| 18 | 0021-01572 | Face Plate, GIGA-Fill SACVD BPSG CENT 23 | AMAT |
| 19 | 0021-01598 | Face Plate, Nickel, Ti-xZ | AMAT |
| 20 | 0021-03637 | Face Plate, Silane Producer 200mm | AMAT |
| 21 | 0021-15200 | FacePlate, BLOK & Hardmask 200mm Producer | AMAT |
| 22 | 0021-35087 | Plate, Blocker N2-Carrier (EH) | AMAT |
| 23 | 0040-95475 | Face Plate, ZDK90, HIGHDEPRATE, TEOS | AMAT |
| 24 | 0021-38119 | Face Plate, DxZ, DCVD, Center Hole | AMAT |
| 25 | 70055-00907E | Shower Plate | ASM |
| 26 | 70055-00817E | Shower Plate | ASM |
| 27 | 70055-70983 | Shower Plate | ASM |
| 28 | 73055-01626A | Shower Plate 12" | ASM |
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