| Item | OEM P/N | Equipment | Wafer size | Remark |
| 1 | 0010-38437 | AMAT | 8" | P Chuck |
| 2 | 0010-02739 | AMAT | 8" run 6" | P Chuck |
| 3 | 0010-02740 | AMAT | 6" | P Chuck |
| 4 | 0010-02741 | AMAT | 6" run 5" | P Chuck |
| 5 | 0010-02742 | AMAT | 6" run 4" | P Chuck |
| 6 | 0010-38438 | AMAT | 8" | C Chuck |
| 7 | 0010-02737 | AMAT | 8" run 6" | C Chuck |
| 8 | 0010-02738 | AMAT | 6" | C Chuck |