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半導體設備零件 Metal Seal
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半導體設備消耗性零件 Metal Seal
Metal Seal are used in a wide variety of applivations where normal seals can't handle extremes of temperature, pressure, medium or combinations there off.
Type of Metal O-Ring/C-Ring
| Type | Applications | |
 | OI OE | Metal O-Ring internal or external pressure face seal - Avoids ingress of thr working fluid into the seal - Moderate load - Moderate pressure capability |
 | OVI | Metal O-Ring internally vented and pressure-energized face seal - Moderate load - High pressure capability |
 | OVE | Metal O-Ring externally vented and pressure-energized face seal - Moderate load - High pressure capability |
 | OSI OSE | Metal O-Ring internal/external spring-energized face seal and axial seal - High load - Moderate pressure capability - Lowest leakrate |
 | OGI OGE | Metal O-Ring internal/external gas-energized face seal and axial seal - High load - Moderate pressure capability - Lowest leakrate |
 | CI | Metal C-Ring internal pressure face seall - Moderate load (lighter flanges & fewer bolts) - Good springback - High pressure capability |
 | CE | Metal C-Ring external pressure face seall - Moderate load - Good springback - High pressure capability |
 | CA | Metal C-Ring ,Axial seal - Close tolerance seal - For light installation loads |
 | CSI | Spring Energized Metal C-Ring, Internal pressure face seal - Lowest leakrate - High load - High pressure capability |
 | CSE | Spring Energized Metal C-Ring, Internal pressure face seal - Lowest leakrate - High load - High pressure capability |
 | CSA | Spring Energized Metal C-Ring, Axial seal - Capable of sealing higher reversing pressure than standard CA-seal |
Material
| Code | Material | Code | Material |
| 1 | Nickel Alloy X-750 | 6 | 304 SS, High tensile strength |
| 2 | Nickel Alloy 718 | 7 | 316 SS |
| 3 | 321 SS | 8 | Hastelloy |
| 4 | Nickel Alloy 600 | 9 | 302 SS |
| 5 | 304 SS |
Finishing Layer
| Code | Finish Material | Code | Finish Material |
| S | Silver (Ag) | L | Lead (Pb) |
| G | Gold (Au) | T | Teflon (PTFE) |
| C | Copper (Cu) | / | Unplated |
| N | Nickel (Ni) |
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